<span style="font-size: 12pt;">★ It is consisted XYZ manual positioning stage assembled with one L bracket to perform tilt movement.</span> <br /><span style="font-size: 12pt;">★ Available potion of XYZ module with ordering code - M3E-2000S-R-[MXYZ60-ACSR]</span>">
Update:2022.7.20
Model No. | M3E-2000S-R | ||||
Specification | Axis | X | Y | Z | |
Travel Stroke (mm) | Rough Tuning | ± 6.5 | ± 6.5 | ± 6.5 | |
Fine Tuning | ± 0.3 | ± 0.3 | ± 0.3 | ||
Accuracy (μm) | Rough Tuning | 10 | 10 | 10 | |
Fine Tuning | 0.5 | 0.5 | 0.5 |
Feed Position |
Characterisitc of Different Guiding Type |
The Main Feeding Mode of Mini Stages |