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    AXYR60 - Precision


    ★3-axis-in-one design:High rigidity, Low energy consumption, Wide applications, Simple operation.
    ★Low profile, High moment rigidity.
    ★Patent:Integrated rotation angle to resolve limited moving stroke problems.
    ★Applied in small size panel production verification test, mobile phone and electronics industry etc.


    This product pic. shows as AXYR60-A2PR-ND.

    SKU: AXYR60-A2PR-ND
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    Update:2022.06.17

    Model No.

    AXYR60-A2PR-ND

    AXYR60-A2PL-ND

    AXYR60-A2UPR-CD

    AXYR60-A2UPL-CD

    Mechanical Spec.

    Table Size (mm)

    Ø 60

    Travel Stroke X Axis (mm)

    ± 7.5

    Travel Stroke Y Axis (mm)

    ± 7.5

    Travel Stroke θ Axis (°)

    ± 8.5

    Drive Type

    Ball Screw

    Rail XY Axis

    Crossed Roller Guiding

    Rail θ Axis

    Crossed Roller Bearing

    Stage Material / Surface Treatment

    Aluminum Alloy / Black anodized

    Accuracy Level

    P:Precision grade 

    UP:Ultra Precision grade 

    Motor Assembly Direction 

    Right

    Left

    Right

    Left

    Precision Spec.

    XY Axis Resolution (Pulse) (µm)

    5 (Full);2.5 (Half)

    2 (Full);1 (Half)

    θ AxisResolution (Pulse) (°)

    0.0056 (Full);0.0028 (Half)

    0.0022 (Full);0.0011 (Half)

    XY Axis Max. Speed (Full Step) (mm / sec)

    10

    5

    θ Axis Max. Speed (Full Step) (° / sec)

    8

    XY Axis Positioning Presion (µm)

    10

    5

    XY Axis Repeatability Precision (µm)

    ± 1

    ± 0.5

    θ Axis Positioning Presion (°)

    0.05

    0.03

    θ Axis Repeatability Precision (°)

    ± 0.01

    ± 0.003

    Load Capacity (Kgf)

    6

    XY Axis Missed Step (µm)

    2

    1

    θ Axis Missed Step (°)

    0.01

    0.003

    Parallelism (µm)

    20

    Dynamic Straightness (µm)

    20

    Dynamic Parallelism (µm)

    10

    Electrical Spec.

    Motor Type

    2MS-N28D32A

    SH5281-7211

    Motor Brand

    GMT

    SANYO

    Connector

    Stage Side Connector

    15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS

    Controller Side Connector

    15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options)

    Sensor

    Power Voltage

    24V ± 10%

    Control Output

    NPN open collector output under 24V 8mA

    Output Control

    Testing (sensing):output transistor OFF (closed)

     

    System Configuration Diagram

    ♦   For selection of the drivers preferred, please refer to the reference table or the catalogue of MotorDriver.

    ♦  All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs. 

     

    Axis Definition

    GMT has defined different axis as the following figuration according to the movement direction:

    Horizontal movement direction is X and Y axis.

    Vertical movement direction is Z axis.

    Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

    Green arrows present the specified axis movement direction.

     

    Motordriver Reference Table

     

     

     

    CTRL press and hold the mouse to move, SHIFT press and hold the mouse to zooom in or out. SKU